Applicable Product: 8-inch pod (7.5kg)
Equipment Capacity: TT: 20S
Operating Environment: Cleanroom class 100
Alignment Mode: Servo-motor controlled
Equipment Dimension: 900W×1200D×8000H
|
Item |
Specification |
|
Applicable Product |
8-inch pod(7.5kg) |
|
Equipment Capacity |
TT: 20S |
|
Operating Environment |
Cleanroom: class 100 |
|
Alignment Mode |
Servo-motor controlled |
|
Equipment Dimension |
900W*1200W*8000H |