Constant-Pressure Tail-Gas Water-Washing Equipment

Processing Capacity: 600 LPM

Structure: Corrosion-resistant materials, full anti-corrosion design

Treatment: Multi-chamber water washing for high gas treatment efficiency

Gas Handled: TCS, HCl, PH₃, B₂H₆; Discharge meets national requirements

Performance: Stable low negative pressure for ASM/3061 epitaxial tail gas

Control: PLC real-time monitoring with reserved monitoring interface