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STK Wafer Storage System

STK Wafer Storage System

Rated Load: 12.5kg

Cycle Time: 18s, Transfer Radius: 520mm

Repetitive Positioning Accuracy: ±0.5mm

Cleanliness Class: 100, Noise ＜70dB

Interface: Ethernet, Control: Manual/standalone/online auto

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Product Parameters

Rated Load

12.5kg

TT Time

18S

Transfer Radius

520mm

Cleanliness Class

100

Repetitive Positioning Accuracy

±0.5mm

Power Supply

220V / Three-phase

Noise Level

< 70dB

Data Interface

Ethernet

Control Mode

Manual, stand-alone automatic and on-line automatic control modes

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