- Email: info@sz-guanke.com
- Whatsapp: 8613812671603
Rated Load: 12.5kg
Cycle Time: 18s, Stroke: 1300×1000mm
Positioning Accuracy: ±0.5mm, Noise ＜70dB
Cleanliness Class: 100
Compatible with 6/8-inch standard semiconductor PODs
|
Rated Load |
12.5kg |
|
TT Time |
18S |
|
Stroke |
1300*1000mm |
|
Cleanliness Class |
100 |
|
Repetitive Positioning Accuracy |
±0.5mm |
|
Power Supply |
220V / Single-phase |
|
Noise Level |
< 70dB |
|
Data Interface |
Ethernet |
|
Control Mode |
Manual, stand-alone automatic and on-line automatic control modes |
|
POD Type |
PCompatible with Entegris spectra series, Shin-Etsu S250 series and other semiconductor-standard PODs (including PODs from Chinese suppliers such as Saijin). Compatible with 6-inch and 8-inch PODs |
